Parametric Testing

Two HP4062C test systems with 48 switchable pins are connected to a Karl Suss 200mm PA200 automatic wafer prober with ProbeShield® EMC for low signal  probing which can be used to perform measurements required by IC-CAP and other parameter extractors under software control. Similar measurements may also be made using HP4145, HP 4156 and Keithley 4200 semiconductor parameter analysers and CV measurements on other manual and semiautomatic probers.