The Cleanroom

A mix of class 10, 100, 1000 and 10,000 areas for conducting research and dvelopment projects

This class 10 cleanroom fabrication facility comprises 250 sq metres controlled to 21±1°C with a relative humidity of 40±5% with a raised floor being used as the air return to the plenum.  Each bay is serviced with DI, town and chilled water, nitrogen, compressed air, power, gases and vacuum.

The cleanroon is well equiped with lithography, dry etch, metalisation, wet decks and inspection  tools with upto wafer 200mm capability

Scottish Microelectronics Centre Cleanroom laboratory corridor
SMC Cleanroom image title